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Fabrication of SOI micromechanical devices
URI:
http://urn.fi/URN:NBN:fi:bib:me:W00392548200
author
Kiihamäki, Jyrki
contributor
Valtion teknillinen tutkimuskeskus
inLanguage
en
isPartOf
Fennica
name
Fabrication of SOI micromechanical devices
P60049
<http://rdaregistry.info/termList/RDAContentType/1020>
Instances
-
2005 : Valtion teknillinen tutkimuskeskus
Fabrication of SOI micromechanical devices
URI:
http://urn.fi/URN:NBN:fi:bib:me:I00392548201
description
Julkaistu myös verkkoaineistona
isPartOf
Fennica
Publications by The Department of Art History at the University of Helsinki
name
Fabrication of SOI micromechanical devices
View this in Finna
Fabrication of SOI micromechanical devices
URI:
http://urn.fi/URN:NBN:fi:bib:me:I00392548200
datePublished
2005
description
kuvitettu
identifier
propertyID:
FI-FENNI
value:
799932
propertyID:
FI-MELINDA
value:
003925482
propertyID:
skl
value:
fx799932
isbn
9513664359
9513864359
isPartOf
Fennica
Publications by The Department of Art History at the University of Helsinki
name
Fabrication of SOI micromechanical devices
numberOfPages
87, [28] sivu
87, [35] sivu
P60048
<http://rdaregistry.info/termList/RDACarrierType/1049>
P60050
<http://rdaregistry.info/termList/RDAMediaType/1007>
publication
location:
Espoo
organizer:
Valtion teknillinen tutkimuskeskus
publisher
Valtion teknillinen tutkimuskeskus
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