Investigation of Conductive ZnO/Al2O3 Nanolaminates grown by Atomic Layer Deposition

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Journal Title
Journal ISSN
Volume Title
Helsinki University of Technology | Diplomityö
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Date
2007
Major/Subject
Optiikka ja molekyylimateriaalit
Mcode
S-129
Degree programme
Language
en
Pages
v + 49
Series
Description
Supervisor
Hakkarainen, Teppo
Thesis advisor
Tiilikainen, Jouni
Keywords
aluminium oxide, atomic layer deposition, nanolaminates, TML, X-ray reflectivity, zinc oxide
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