Electronic cooling of a submicron-sized metallic beam

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Journal Title
Journal ISSN
Volume Title
School of Science | A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä
Date
2009
Major/Subject
Mcode
Degree programme
Language
en
Pages
073101/1-3
Series
Applied Physics Letters, Volume 94, Issue 7
Abstract
We demonstrate electronic cooling of a suspended AuPd island using superconductor-insulator-normal metaltunnel junctions. This was achieved by developing a simple fabrication method for reliably releasing narrow submicron-sized metal beams. The process is based on reactive ion etching and uses a conducting substrate to avoid charge-up damage and is compatible with, e.g., conventional e-beam lithography, shadow-angle metal deposition, and oxide tunnel junctions. The devices function well and exhibit clear cooling, up to a factor of 2 at sub-Kelvin temperatures.
Description
Keywords
phonons, superconducting metals, tunnel junctions, etching, microelectromechanical systems
Other note
Citation
Muhonen, J. T. & Niskanen, A. O. & Meschke, M. & Pashkin, Yu. A. & Tsai, J. S. & Sainiemi, L. & Franssila, S. & Pekola, Jukka. 2009. Electronic cooling of a submicron-sized metallic beam. Applied Physics Letters. Volume 94, Issue 7. P. 073101/1-3. ISSN 0003-6951 (printed). DOI: 10.1063/1.3080668.