Nonlinear excitation of a rotational mode in a piezoelectrically excited square-extensional mode resonator

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Journal Title
Journal ISSN
Volume Title
School of Science | A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä
Date
2012
Major/Subject
Mcode
Degree programme
Language
en
Pages
153508
Series
Applied Physics Letters, Volume 100, Issue 15
Abstract
We present an experimental study of the nonlinear behavior of a square-extensional (SE) mode microelectromechanicalresonator, actuated with a piezoelectricAlNthin film. The acoustic vibration fields of the device are characterized using laser probing. A nonlinear vibration behavior of the SE mode is observed above a drive power level of −10 dBm such that the vibration amplitude of the SE mode saturates and a rotational in-plane vibration mode is excited at a significantly lower frequency (0.725 MHz) than the SE mode (16.670 MHz). Interestingly, the measured∼10 nm saturation amplitude of the SE mode is more than a decade below the amplitude value at which mechanical or electromechanical nonlinearities are estimated to become significant.
Description
Keywords
microelectromechanical resonators, MEMS resonators, silicon resonators, acoustic behavior, square-extensional (SE) mode, vibration fields
Other note
Citation
Lipiäinen, Lauri & Jaakkola, Antti & Kokkonen, Kimmo & Kaivola, Matti. 2012. Nonlinear excitation of a rotational mode in a piezoelectrically excited square-extensional mode resonator. Applied Physics Letters. Volume 100, Issue 15. 153508. ISSN 1077-3118 (electronic). ISSN 0003-6951 (printed). DOI: 10.1063/1.3703119.